Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by
RF magnetron sputtering
(1. Department of Advanced Materials Engineering, Chosun University, Gwangju 501-759, Korea;
2. BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University,
Gwangju 501-759, Korea)
2. BK21 Education Center of Mould Technology for Advanced Materials and Parts, Chosun University,
Gwangju 501-759, Korea)
Abstract: Titanium-based nitride coatings on cutting tools, press molds and dies can be used to prolong their life cycle because of their superior corrosion and oxidation resistance. TiAlN/ZrN and TiCrN/ZrN multilayer coatings were prepared by RF magnetron sputtering, and their microstructural evolution and corrosion resistance during heat treatment were investigated. The TiAlN/ZrN and TiCrN/ZrN multilayer coatings are degraded by heating up to 600 ℃ with the formation of oxides particles on the surface. During the heat treatment, the TiCrN/ZrN and TiAlN/ZrN multilayer coatings show the lowest corrosion current density and the highest polarization resistance at temperature range of 400−500 ℃. Consequently, the TiAlN/ZrN and TiCrN/ZrN multilayer coatings show good corrosion resistance at temperature range of 400−500 ℃ during heating.
Key words: TiCrN/ZrN; TiAlN/ZrN; multilayer coating; RF magnetron sputtering