Properties of W/DLC/W-S-C composite films fabricated bymagnetron sputtering
(1. School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China;
2. New Materials Department, Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510650, China;
3. National Engineering Laboratory for Modern Materials Surface Engineering Technology,
Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510650, China)
2. New Materials Department, Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510650, China;
3. National Engineering Laboratory for Modern Materials Surface Engineering Technology,
Guangzhou Research Institute of Non-ferrous Metals, Guangzhou 510650, China)
Abstract: A kind of W/DLC/W-S-C composite film was fabricated by magnetron sputtering method. Effects of WSx content on the structure and the adhesion of the composite films were investigated. In addition, tribological behavior of the composite films was studied in the conditions of the ambient air and N2 gas atmosphere by ball-on-disk tester. The results indicate that the composite films show dense and amorphous microstructure. The WCx and WSx compounds are found in amorphous diamond like carbon matrix in the top layers of W-S-C. A proper WSx content is beneficial for improving the adhesion of the composite films. In air atmosphere, the composite films with high C content have better wear resistance and the friction coefficients range from 0.15 to 0.25. In N2 condition, high WSx content is benefit for the wear resistance and the friction coefficients of the composite films range from 0.03 to 0.1.
Key words: W/DLC/W-S-C composite film;magnetron sputtering;adhesion strength;friction coefficient