Characteristics of Cu implantation into Si by
PBII using UBMS cathode
PBII using UBMS cathode
(School of Materials Science and Engineering,
Harbin Instituteof Technology,Harbin 150001, P.R.China)
Harbin Instituteof Technology,Harbin 150001, P.R.China)
Abstract: The implantation of Cu into Si substrate was carried out by plasmabased ion implantation (PBII) using unbalanced magnetron sputtering (UBMS) cathode as the metal plasma source. The different pulse bias ( Up ) and the distance between the cathode and the samples ( ds-t ) were chosen to research the characteristics of this method. The results show that the implantation of metal ions can be realized by the metal plasma source of UBMS cathode. The physical process such as the metal ion pure implantation, the gas ion implantation, the recoil implantation of the metal atoms, the deposition of the metal particles and the resputtering of the metal film depend on the energy, dose and deposition rate of the ions ( Cu+, Ar+ ). The metal plasma based ion implantation of Cu into Si substrate is favored by selecting higher Up (60 kV) and larger ds-t (200 mm).
Key words: unbalanced magnetron sputtering; plasmabased ion implantation; recoil implantation