Gas sensitivity of indium oxide
(1. Fujian Key Laboratory of Microelectronic IC, Fuzhou University, Fuzhou 350002, China;
2. College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China)
2. College of Material Science and Engineering, Fuzhou University, Fuzhou 350002, China)
Abstract: The yellow indium oxide nanoparticles were prepared by sintering the white deposition at 500 ℃. The crystalline indium chloride and ammonia were used as the starting material. The results show that, by analyzing the particles through X-ray diffraction and TEM, the particles are very small, spherical, and the particle size is about 40 nm. The direct-heat components made from indium oxide in Cl2 and NO2 was tested respectively, the component is far more sensitive to NO2 than to Cl2 at low heating temperature, and the status is reversed at high heating temperature.
Key words: indium oxide; gas sensor; gas sensitivity