An effective round ball tool in electrochemistry process as novel reuse fabrication technology
(Department of Digital Content Design, Graduate School of Toy and Game Design,
National Taipei University of Education, Taipei 106)
National Taipei University of Education, Taipei 106)
Abstract: A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In2O3SnO2 thin film from the surfaces of digital paper display was presented. The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space. Using a small size of the round-ball tool takes less time for the same amount of In2O3SnO2 layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power. A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate. A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece. Through the ultra-precise etching of In2O3SnO2, the optoelectronic semiconductor industry can effectively reuse the defective products, reducing production costs. This precision etching process is of high efficiency and requires only a short period of time to remove the In2O3SnO2 nanostructures.
Key words: thin film; round-ball tool; In2O3SnO2; micro electrochemistry; digital paper display