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沉积温度对甲基硅烷化学气相沉积SiC涂层显微组织和烧蚀性能的影响
胡祥龙,罗骁,杨鑫,谭瑞轩,黄启忠
中国有色金属学报(英文版) ›› 2023, Vol. 33 ›› Issue (12) : 3797-3811.
PDF(7749 KB)
PDF(7749 KB)
沉积温度对甲基硅烷化学气相沉积SiC涂层显微组织和烧蚀性能的影响
({{custom_author.role_cn}}), {{javascript:window.custom_author_cn_index++;}}Effects of deposition temperature on microstructures and ablative properties of SiC coatings prepared by CVD from methylsilane
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