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Preparation and properties of SiCN diffusion barrier layer for
Cu interconnect in ULSI
ZHOUJi-cheng(周继承),SHIZhi-jie(石之杰),ZHENGXu-qiang(郑旭强)
Preparation and properties of SiCN diffusion barrier layer for
Cu interconnect in ULSI
ZHOUJi-cheng(周继承),SHIZhi-jie(石之杰),ZHENGXu-qiang(郑旭强)
中国有色金属学报(英文版) . 2009, (03): 611 -615 .