Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering
Do-HoonSHIN,Yun-HaeKIM,Joong-WonHAN,Kyung-ManMOON,Ri-IchiMURAKAMI
Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering
Do-HoonSHIN,Yun-HaeKIM,Joong-WonHAN,Kyung-ManMOON,Ri-IchiMURAKAMI
中国有色金属学报（英文版）
.
2009, (04): 997
-1000
.
