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Effect of gas pressure on residual stresses
in AlN films deposited on Al substrates
TIANJing(田竞),XUEXiang(薛祥),TakaoHanabusa,KazayaKusaka
Effect of gas pressure on residual stresses
in AlN films deposited on Al substrates
TIANJing(田竞),XUEXiang(薛祥),TakaoHanabusa,KazayaKusaka
中国有色金属学报(英文版) . 2003, (Special 1): 202 -205 .