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Elastic modulus of TiN film investigated with Kroner
model and X-ray diffraction
ZHANG Ming(张  铭), SUN Hai-lin(孙海林), HE Jia-wen(何家文)
Elastic modulus of TiN film investigated with Kroner
model and X-ray diffraction
ZHANG Ming(张  铭), SUN Hai-lin(孙海林), HE Jia-wen(何家文)
中国有色金属学报(英文版) . 2001, (01): 63 -66 .