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Characteristics of Cu implantation into Si by
PBII using UBMS cathode
YU Wei-dong(于伟东), XIA Li-fang(夏立芳), SUN Yue(孙 跃)
Characteristics of Cu implantation into Si by
PBII using UBMS cathode
YU Wei-dong(于伟东), XIA Li-fang(夏立芳), SUN Yue(孙 跃)
中国有色金属学报(英文版) . 2001, (02): 173 -177 .