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TiN coating on wall of holes and stitches by pulsed DC plasma enhanced CVD
MASheng-li(马胜利),XUKe-wei(徐可为),JIEWan-qi(介万奇)
TiN coating on wall of holes and stitches by pulsed DC plasma enhanced CVD
MASheng-li(马胜利),XUKe-wei(徐可为),JIEWan-qi(介万奇)
中国有色金属学报(英文版) . 2003, (04): 898 -901 .