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Review of micromachining of ceramics by etching
H.T.TING,K.A.ABOU-EL-HOSSEIN,H.B.CHUA
Review of micromachining of ceramics by etching
H.T.TING,K.A.ABOU-EL-HOSSEIN,H.B.CHUA
中国有色金属学报(英文版) . 2009, (Special 1): 1 -16 .