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Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization
WANG Xin-jian(王新建), DONG Xian-ping(董显平), JIANG Chuan-hai(姜传海)
Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization
WANG Xin-jian(王新建), DONG Xian-ping(董显平), JIANG Chuan-hai(姜传海)
中国有色金属学报(英文版) . 2010, (02): 217 -222 .