Aluminum doping and dielectric properties of silicon carbide by CVD
LIZhi-min(李智敏),SUXiao-lei(苏晓磊),LUOFa(罗 发), ZHUDong-mei(朱冬梅),ZHOUWan-cheng(周万城)
Aluminum doping and dielectric properties of silicon carbide by CVD
LIZhi-min(李智敏),SUXiao-lei(苏晓磊),LUOFa(罗 发), ZHUDong-mei(朱冬梅),ZHOUWan-cheng(周万城)
中国有色金属学报(英文版)
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2007, (Special 1): 858
-861
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