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Fabrication of curved micro structures on photoresist layer
Jae Sung YOON, Tae-Jin JE, Doo-Sun CHOI, Sung Hwan CHANG, Kyung-Hyun WHANG
Fabrication of curved micro structures on photoresist layer
Jae Sung YOON, Tae-Jin JE, Doo-Sun CHOI, Sung Hwan CHANG, Kyung-Hyun WHANG
中国有色金属学报(英文版) . 2011, (Special 1): 100 -103 .