基片偏压对电弧离子镀ZrN薄膜微结构和表面形貌的影响
张 敏,胡小刚,杨晓旭,徐菲菲,金光浩,邵志刚
Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating
ZHANGMin,HUXiao-gang,YANGXiao-xu,XUFei-fei,KIMKwang-Ho,SHAOZhi-gang
中国有色金属学报(英文版)
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2012, (Special 1): 115
-119
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