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双靶磁控溅射沉积Cu-W薄膜组织结构特征及其演变
周灵平,汪明朴,彭坤,朱家俊,傅臻,李周
Structure characteristic and its evolution of Cu-W films prepared by dual-target magnetron sputtering deposition
ZHOULing-ping,WANGMing-pu,PENGKun,ZHUJia-jun,FUZhen,LIZhou
中国有色金属学报(英文版) . 2012, (11): 2700 -2706 .