CVD掺硅金刚石残余应力的X射线衍射和拉曼光谱分析
陈苏琳, 沈 彬, 张建国, 王 亮, 孙方宏
Evaluation on residual stresses of silicon-doped CVD diamond films using X-ray diffraction and Raman spectroscopy
CHEN Su-lin, SHEN Bin, ZHANG Jian-guo, WANG Liang, SUN Fang-hong
中国有色金属学报(英文版)
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2012, (12): 3021
-3026
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