Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulsemagnetron sputtering (HIPIMS) and DC pulse sputtering
MinSuKANG,Tie-gangWANG,JungHoSHIN,RomanNOWAK,KwangHoKIM,
Synthesis and properties of Cr-Al-Si-N films deposited by hybrid coating system with high power impulsemagnetron sputtering (HIPIMS) and DC pulse sputtering
MinSuKANG,Tie-gangWANG,JungHoSHIN,RomanNOWAK,KwangHoKIM,
中国有色金属学报（英文版）
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2012, (Special 3): 729
-734
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