溅射气压对AlN薄膜纳米结构和纳米力学性能的影响
魏秋平,张雄伟,刘丹瑛,李劼,周科朝,张斗,余志明,
Effects of sputtering pressure on nanostructure and nanomechanical properties of AlN films prepared by RF reactive sputtering
Qiu-pingWEI,Xiong-weiZHANG,Dan-yingLIU,JieLI,Ke-chaoZHOU,DouZHANG,Zhi-mingYU,
中国有色金属学报（英文版）
.
2014, (9): 2845
-2855
.
