频率和脉冲时间对大功率脉冲磁控溅射氮化钛沉积速率和形貌的影响
Saeed GHASEMI, Ali Reza FARHADIZADEH, Hamid GHOMI
Effect of frequency and pulse-on time of high power impulse magnetron sputtering on deposition rate and morphology of titanium nitride using response surface methodology
Saeed GHASEMI, Ali Reza FARHADIZADEH, Hamid GHOMI
中国有色金属学报（英文版）
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2019, (12): 2577
-2590
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