a-C∶F∶H films prepared by PECVD①
LIUXiong-fei(刘雄飞),XIAOJian-rong(肖剑荣),JIANXian-zhong(简献忠),WANGJin-bin(王金斌),GAOJin-ding(高金定)
a-C∶F∶H films prepared by PECVD①
LIUXiong-fei(刘雄飞),XIAOJian-rong(肖剑荣),JIANXian-zhong(简献忠),WANGJin-bin(王金斌),GAOJin-ding(高金定)
中国有色金属学报(英文版)
.
2004, (03): 426
-429
.