Al2O3插入层对HfO2/ZrO2叠层薄膜铁电性能的影响
陈海燕,陈永红,梁秋菊,王志国,曹俊,张斗
Effect of Al2O3 insertion layer on ferroelectricity in HfO2/ZrO2 nanolaminates
Hai-yanCHEN,Yong-hongCHEN,Qiu-juLIANG,Zhi-guoWANG,JunCAO,DouZHANG
中国有色金属学报(英文版)
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2023, (10): 3113
-3121
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DOI: 10.1016/S1003-6326(23)66321-6