偏压对非平衡磁控溅射ZrNbAlN薄膜的成分、力学性能及腐蚀特性的影响
石永敬,潘复生,鲍明东,潘虎成,MuhammadRASHAD
Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering
Yong-jingSHI,Fu-shengPAN,Ming-dongBAO,Hu-chengPAN,MuhammadRASHAD
中国有色金属学报（英文版）
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2014, (9): 2856
-2863
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