斜角沉积和热处理对射频溅射ITO薄膜光学性能的影响
L.G.DAZA,M.ACOSTA,R.CASTRO-RODRíGUEZ,A.IRIBARREN
Tuning optical properties of ITO films grown by rf sputtering: Effects of oblique angle deposition and thermal annealing
L.G.DAZA,M.ACOSTA,R.CASTRO-RODRíGUEZ,A.IRIBARREN
中国有色金属学报（英文版）
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2019, (12): 2566
-2576
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