Efficient chemical mechanical polishing of W promoted by Fenton-like reaction between Cu2+ and H2O2

Hong-yu CHEN, Lin WANG, Feng PENG, Meng-meng SHEN, Wei HANG, Tufa Habtamu BERI, Hui-bin ZHANG, Jun ZHAO, Yun-xiao HAN, Bing-hai Lü

Transactions of Nonferrous Metals Society of China ›› 2025, Vol. 35 ›› Issue (1) : 257-270.

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Transactions of Nonferrous Metals Society of China ›› 2025, Vol. 35 ›› Issue (1) : 257-270. DOI: 10.1016/S1003-6326(24)66678-1
Materials Science and Engineering

Efficient chemical mechanical polishing of W promoted by Fenton-like reaction between Cu2+ and H2O2

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2025, 35(1): 257-270 https://doi.org/10.1016/S1003-6326(24)66678-1

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