X-RAY STUDY ON  TITANIUM NITRIDE FILMS DEPOSITED BY VCAD METHOD

Liu Xingcheng, Yuan Zhenhai, Dai Dahuan

Transactions of Nonferrous Metals Society of China ›› 1992, Vol. 2 ›› Issue (01) : 65-68.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 1992, Vol. 2 ›› Issue (01) : 65-68.
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X-RAY STUDY ON  TITANIUM NITRIDE FILMS DEPOSITED BY VCAD METHOD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1992, 2(01): 65-68

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