INFLUENCE OF NITROGEN ON THERMAL WARPAGE IN CZOCHRALSKI SILICON WAFERS

Lu Huanming

Transactions of Nonferrous Metals Society of China ›› 1999, Vol. 9 ›› Issue (02) : 352-354.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 1999, Vol. 9 ›› Issue (02) : 352-354.
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INFLUENCE OF NITROGEN ON THERMAL WARPAGE IN CZOCHRALSKI SILICON WAFERS

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 9(02): 352-354

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