Microstructures and properties of Si_3N_4/TiN ceramic nano-multilayer films

Xu Junhua(许俊华); Gu Mingyuan(顾明元); Li Geyang(李戈扬); Jin Yanping(金燕平)

Transactions of Nonferrous Metals Society of China ›› 1999, Vol. 9 ›› Issue (04) : 764-767.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 1999, Vol. 9 ›› Issue (04) : 764-767.
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Microstructures and properties of Si_3N_4/TiN ceramic nano-multilayer films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1999, 9(04): 764-767

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