HREM study on stacking structure of SiGe/Si infrared detector①

LIU An-sheng(刘安生), LIU Zheng(刘　峥), SHAO Bei-ling(邵贝羚), WANG Jing(王　敬)

Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (02) : 149-155.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (02) : 149-155.
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HREM study on stacking structure of SiGe/Si infrared detector①

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 10(02): 149-155

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