Effects of gradient interlayer on residual stress and
cracking in TiN thin films①

QIXuan(漆王睿),LIGe-yang(李戈扬),SHIXiao-rong(施晓荣),LXia(吕霞),LIPeng-xing(李鹏兴)

Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (03) : 294-297.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (03) : 294-297.
0

Effects of gradient interlayer on residual stress and
cracking in TiN thin films①

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 10(03): 294-297

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