Pulsed DC plasma enhanced chemical vapor deposited
TiN/Ti(C,N) multilayer coatings①

MA Sheng-li(马胜利), LI Yan-huai(李雁淮), NAN Jun-ma(南俊马), XU Ke-wei(徐可为)

Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (04) : 489-492.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (04) : 489-492.
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Pulsed DC plasma enhanced chemical vapor deposited
TiN/Ti(C,N) multilayer coatings①

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 10(04): 489-492

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