Characterization of magnetron sputtering TiB2and Ti-B-N thin films①

ZHANG Tong-jun(张同俊), M. S. Wong, W. D. Sproul, Y. W. Chung

Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (05) : 619-624.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2000, Vol. 10 ›› Issue (05) : 619-624.
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Characterization of magnetron sputtering TiB2and Ti-B-N thin films①

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 10(05): 619-624

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