Elastic modulus of TiN film investigated with Kroner
model and X-ray diffraction
ZHANG Ming(张 铭), SUN Hai-lin(孙海林), HE Jia-wen(何家文)
Transactions of Nonferrous Metals Society of China ›› 2001, Vol. 11 ›› Issue (01) : 63-66.
Elastic modulus of TiN film investigated with Kroner
model and X-ray diffraction
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