Characteristics of Cu implantation into Si by
PBII using UBMS cathode

YU Wei-dong(于伟东), XIA Li-fang(夏立芳), SUN Yue(孙 跃)

Transactions of Nonferrous Metals Society of China ›› 2001, Vol. 11 ›› Issue (02) : 173-177.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2001, Vol. 11 ›› Issue (02) : 173-177.
MATERIALS SCIENCE AND ENGINEERING

Characteristics of Cu implantation into Si by
PBII using UBMS cathode

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 11(02): 173-177

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