Characteristics of Si+/B+ dual
implanted silicon wafers

ZHOU Ji-cheng(周继承), HUANG Bai-yun(黄伯云)

Transactions of Nonferrous Metals Society of China ›› 2001, Vol. 11 ›› Issue (05) : 753-755.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2001, Vol. 11 ›› Issue (05) : 753-755.
MATERIALS SCIENCE AND ENGINEERING

Characteristics of Si+/B+ dual
implanted silicon wafers

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 11(05): 753-755

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