Corrosion electrochemical mechanism of
chemical mechanical polishing of
copper in K3Fe(CN)6 solution

HEHan-wei(何捍卫)，HUYue-hua(胡岳华),HUANGKe-long(黄可龙)

Transactions of Nonferrous Metals Society of China ›› 2002, Vol. 12 ›› Issue (01) : 178-182.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2002, Vol. 12 ›› Issue (01) : 178-182.
MINERAL PROCESSING, METALLURGY AND CHEMISTRY

Corrosion electrochemical mechanism of
chemical mechanical polishing of
copper in K3Fe(CN)6 solution

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2002, 12(01): 178-182

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