TiN coating on wall of holes and stitches by pulsed DC plasma enhanced CVD

MASheng-li(马胜利),XUKe-wei(徐可为)，JIEWan-qi(介万奇)

Transactions of Nonferrous Metals Society of China ›› 2003, Vol. 13 ›› Issue (04) : 898-901.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2003, Vol. 13 ›› Issue (04) : 898-901.
MATERIALS SCIENCE AND ENGINEERING

TiN coating on wall of holes and stitches by pulsed DC plasma enhanced CVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 13(04): 898-901

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