a-C∶F∶H films prepared by PECVD

LIUXiong-fei(刘雄飞),XIAOJian-rong(肖剑荣),JIANXian-zhong(简献忠),WANGJin-bin(王金斌),GAOJin-ding(高金定)

Transactions of Nonferrous Metals Society of China ›› 2004, Vol. 14 ›› Issue (03) : 426-429.

Transactions of Nonferrous Metals Society of China ›› 2004, Vol. 14 ›› Issue (03) : 426-429.
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a-C∶F∶H films prepared by PECVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2004, 14(03): 426-429

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