a-C∶F∶H films prepared by PECVD①
LIUXiong-fei(刘雄飞),XIAOJian-rong(肖剑荣),JIANXian-zhong(简献忠),WANGJin-bin(王金斌),GAOJin-ding(高金定)
Transactions of Nonferrous Metals Society of China ›› 2004, Vol. 14 ›› Issue (03) : 426-429.
a-C∶F∶H films prepared by PECVD①
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