Si3N4/CrN nanostructured multilayers grown by RF
reactive magnetron sputtering①

JIANGShi-hang(姜世杭),XUJun-hua(许俊华),LIGe-yang(李戈扬)

Transactions of Nonferrous Metals Society of China ›› 2004, Vol. 14 ›› Issue (04) : 692-696.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2004, Vol. 14 ›› Issue (04) : 692-696.
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Si3N4/CrN nanostructured multilayers grown by RF
reactive magnetron sputtering①

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2004, 14(04): 692-696

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