Sputter-deposited TiNiPd alloy films on Si wafer

QIANShi-qiang(钱士强), WUJian-sheng(吴建生)

Transactions of Nonferrous Metals Society of China ›› 2005, Vol. 15 ›› Issue (04) : 868-872.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2005, Vol. 15 ›› Issue (04) : 868-872.
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Sputter-deposited TiNiPd alloy films on Si wafer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2005, 15(04): 868-872

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