Influence of nitrogen doping on thermal stability
of fluorinated amorphous carbon thin films

LIU Xiong-fei(刘雄飞), ZHOU Xin(周 昕), GAO Jin-ding(高金定)

Transactions of Nonferrous Metals Society of China ›› 2006, Vol. 16 ›› Issue (01) : 54-54.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2006, Vol. 16 ›› Issue (01) : 54-54.
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Influence of nitrogen doping on thermal stability
of fluorinated amorphous carbon thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 16(01): 54-54

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