Manipulation of space charge in silicon by intentional thermal donor activation

E.TUOMINEN，HARKONEN，P.LUUKKA，K.TOSHA

Transactions of Nonferrous Metals Society of China ›› 2006, Vol. 16 ›› Issue (z2) : 240-245.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2006, Vol. 16 ›› Issue (z2) : 240-245.
Selected Papers from The 5th International Forum on Advanced Material Science and Technology

Manipulation of space charge in silicon by intentional thermal donor activation

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 16(z2): 240-245

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