Structure and electronic properties of SiC thin-films
deposited by RF magnetron sputtering

ZHOU Ji-cheng(周继承), ZHENG Xu-qiang(郑旭强)

Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (02) : 373-373.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (02) : 373-373.
0

Structure and electronic properties of SiC thin-films
deposited by RF magnetron sputtering

  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 17(02): 373-373

References

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}

Accesses

Citation

Detail
Sections
Recommended
Superintended by The China Association for Science and Technology (CAST)
Sponsored by The Nonferrous Metals Society of China (NFSOC)
Managed by Central South University (CSU)
Add: Central South University, Changsha 410083, China
Tel: +86-731-88876765 or +86-731-88877197
Fax: +86-731-88877197
E-mail: f-ysxb@mail.csu.edu.cn
Wechat ID
Copyright © Editorial Office of Transactions of Nonferrous Metals Society of China    湘ICP备09001153号-9

/

〈 〉