Diffusion barrier performance of nanoscale TaNx thin-film

ZHOU Ji-cheng(周继承), CHEN Hai-bo(陈海波), LI You-zhen(李幼真)

Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (04) : 733-733.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (04) : 733-733.
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Diffusion barrier performance of nanoscale TaNx thin-film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 17(04): 733-733

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