Aluminum doping and dielectric properties of silicon carbide by CVD

LIZhi-min(李智敏),SUXiao-lei(苏晓磊),LUOFa(罗 发), ZHUDong-mei(朱冬梅),ZHOUWan-cheng(周万城)

Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (Special 1) : 858-861.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2007, Vol. 17 ›› Issue (Special 1) : 858-861.
Nanomaterials, Thin Films and Coatings

Aluminum doping and dielectric properties of silicon carbide by CVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 17(Special 1): 858-861

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