Influence of sputtering parameters on microstructure and mechanical properties of GeSbTe films

FU Yong-zhong(付永忠)

Transactions of Nonferrous Metals Society of China ›› 2008, Vol. 18 ›› Issue (01) : 167-167.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2008, Vol. 18 ›› Issue (01) : 167-167.
Functional Materials

Influence of sputtering parameters on microstructure and mechanical properties of GeSbTe films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2008, 18(01): 167-167

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