Effect of sputtering pressure and rapid thermal annealing on
optical properties of Ta2O5 thin films

ZHOU Ji-cheng(周继承), LUO Di-tian(罗迪恬), LI You-zhen(李幼真), LIU Zheng(刘 正)

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (02) : 359-363.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (02) : 359-363.
Functional Materials

Effect of sputtering pressure and rapid thermal annealing on
optical properties of Ta2O5 thin films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(02): 359-363

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