Preparation and properties of SiCN diffusion barrier layer for
Cu interconnect in ULSI

ZHOUJi-cheng(周继承),SHIZhi-jie(石之杰),ZHENGXu-qiang(郑旭强)

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (03) : 611-615.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (03) : 611-615.
Functional Materials

Preparation and properties of SiCN diffusion barrier layer for
Cu interconnect in ULSI

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(03): 611-615

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